Fabrication of sealed nanofluidic channels using site-selective direct write (maskless) X-ray lithography

Author： Leontowich Adam   Hitchcock Adam  

Publisher： Springer Publishing Company

ISSN： 1613-4982

Source： Microfluidics and Nanofluidics, Vol.15, Iss.4, 2013-10, pp. : 509-518

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