Author： Kim Yohan Ippen Christian Greco Tonino Jang Ilwan Park Sungkyu Oh Min Han Chul Lee Jeongno Wedel Armin Kim Jiwan
Publisher： Springer Publishing Company
ISSN： 1738-8090
Source： Electronic Materials Letters, Vol.10, Iss.2, 2014-03, pp. : 479-483
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Mo Xiaoming Fang Guojia Long Hao Huang Huihui Li Songzhan Wang Haoning Qin Pingli
Semiconductor Science and Technology, Vol. 28, Iss. 1, 2013-01 ,pp. :
Access to resources
Recommend
