Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Publisher： IOP Publishing

E-ISSN： 1361-6463|49|2|25307-25315

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.49, Iss.2, 2016-01, pp. : 25307-25315

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