Assembly and measuring technique for the manufacturing of active micro systems

Author： Hesselbach J.   Tutsch R.   Büttgenbach S.   Pokar G.   Bütefisch S.   Berndt M.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.3, 2004-03, pp. : 182-186

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