Micro electron beam welding and laser machining – potentials of beam welding methods in the micro-system technology

Author： Smolka G.   Gillner A.   Bosse L.   Lützeler R.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.3, 2004-03, pp. : 187-192

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