Evaluation of optical qualities of a LIGA-spectrometer in SU-8

Author： Mappes T.   Achenbach S.   Last A.   Mohr J.   Truckenmüller R.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 560-563

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