Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures

Author: Bhushan B.   Kasai T.   Nguyen C.V.   Meyyappan M.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.10, Iss.8-9, 2004-11, pp. : 633-639

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