MEMS-based formaldehyde gas sensor integrated with a micro-hotplate

Author： Lee Chia-Yen   Hsieh Ping-Ru   Lin Che-Hsin   Chou Po-Cheng   Fu Lung-Ming   Chiang Che-Ming  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 893-898

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors

By Wang Yu-Hsiang  

Microsystem Technologies, Vol. 14, Iss. 7, 2008-07 ,pp. : 995-1000

Springer Publishing Company

Access to resources Recommend Favorite

MEMS-based combustor with hairpin-shape design of gas recirculation channel

By Wang Z.   Wu M.   Shan X.   Hua J.  

Microsystem Technologies, Vol. 12, Iss. 10-11, 2006-09 ,pp. : 993-997

Springer Publishing Company

Access to resources Recommend Favorite

HARM type MEMS-based reed switch innovations address medical, automotive and other micro switching applications not previously possible

By Bloss Richard  

Assembly Automation, Vol. 34, Iss. 3, 2014-07 ,pp. : 222-226

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Recent developments in MEMS-based miniature fuel cells

By Pichonat Tristan   Gauthier-Manuel Bernard  

Microsystem Technologies, Vol. 13, Iss. 11-12, 2007-07 ,pp. : 1671-1678

Springer Publishing Company

Access to resources Recommend Favorite

Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

By Chang Hsien-Tsung   Lee Chia-Yen   Wen Chih-Yung  

Microsystem Technologies, Vol. 13, Iss. 11-12, 2007-07 ,pp. : 1615-1622

Springer Publishing Company

Access to resources Recommend Favorite