Elastic–plastic modeling of heat-treated bimorph micro-cantilevers

Author： Lee Chia-Yen Tsai Chien-Hsiung Chen Li-Wen Fu Lung-Ming Chen Yung-Chuan

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 979-986

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