Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 455-463

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Fabrication of the monolithic polymer–metal microstructure by the backside exposure and electroforming technology

By Chung C. Hong Y. Chang W.

Microsystem Technologies, Vol. 13, Iss. 5-6, 2007-03 ,pp. : 531-536

Springer Publishing Company

Access to resources Recommend Favorite

Design, fabrication, and test of a peristaltic micropump

By Knight M. House J.

Microsystem Technologies, Vol. 10, Iss. 5, 2004-08 ,pp. : 426-431

Springer Publishing Company

Access to resources Recommend Favorite

New electroforming technology pressure aid for LIGA process

By Tsai T.-H. Yang H. Chein R.

Microsystem Technologies, Vol. 10, Iss. 5, 2004-08 ,pp. : 351-356

Springer Publishing Company

Access to resources Recommend Favorite

Fabrication, experiment of a microactuator using magnetic fluid for micropump application

By Sim Wonchul Oh Jaegeun Choi Bumkyoo

Microsystem Technologies, Vol. 12, Iss. 12, 2006-10 ,pp. : 1085-1091

Springer Publishing Company

Access to resources Recommend Favorite

Design, Fabrication and Testing of a Nozzle/Diffuser PDMS Micropump with Top Actuation

Micro and Nanosystems, Vol. 3, Iss. 1, 2011-03 ,pp. : 8-13

Bentham Science Publishers

Access to resources Recommend Favorite