Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever

Author: Lee Sang   Kim Pan   Moon Wonkyu   Lim Geunbae  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 579-587

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