Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Author： Yoon Yong-Joong   Choi Hyun   Kim Wan-Chin   Song TaeSun   Park No-Cheol  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 1289-1295

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