Fabrication and experimental study of Al₂O₃-TiC sliders with piezoelectric nanoactuators for flying height control

Author： Juang Jia-Yang Ambekar Rohit Bogy David Bhatia C.

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 751-757

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