Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

Author: Xue Xiaojie   Phinney Leslie   Polycarpou Andreas  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.1, 2008-01, pp. : 17-29

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