Study of an eletrostatically actuated torsional micromirror with compliant planar springs

Author： You Jianliang   Packirisamy Muthukumaran   Stiharu Ion  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.1, 2008-01, pp. : 7-16

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