Development of automated microrobot-based nanohandling stations for nanocharacterization

Author： Fatikow Sergej   Eichhorn Volkmar   Krohs Florian   Mircea Iulian   Stolle Christian   Hagemann Saskia  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 463-474

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