Tensile crack patterns in Mo/Si multilayers on Si substrates under high-temperature bending

Author： Meyer D.C.   Leisegang T.   Levin A.A.   Paufler P.   Volinsky A.A.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.78, Iss.3, 2004-02, pp. : 303-305

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