Investigations of silicon nitride and boron carbide monolayers and Si3N4/B4C multilayers

Author： Lattemann M.   Ulrich S.   Leiste H.   Nold E.   Holleck H.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.78, Iss.5, 2004-03, pp. : 659-662

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