Low-temperature PECVD of silicon dioxide on polymeric hydrogels

Author: Suchaneck G.   Guenther M.   Sorber J.   Gerlach G.   Arndt K.-F.   Wolf B.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.78, Iss.5, 2004-03, pp. : 695-698

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