Deposition of high-resolution Carbon/Carbon multilayers on large areas for X-ray optical applications

Author: Menzel M.   Weissbach D.   Gawlitza P.   Dietsch R.   Leson A.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 1039-1042

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