Multiple release layer study of the intrinsic lateral etch rate of the epitaxial lift-off process

Author： Voncken M.M.A.J. Schermer J.J. Bauhuis G.J. Mulder P. Larsen P.K.

ISSN： 0947-8396

Source： Applied Physics A, Vol.79, Iss.7, 2004-11, pp. : 1801-1807

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Improvement of resistive switching fluctuations by using one step lift‐off process

PHYSICA STATUS SOLIDI - RAPID RESEARCH LETTERS (ELECTRONIC), Vol. 9, Iss. 10, 2015-10 ,pp. : 594-596

John Wiley & Sons Inc

Access to resources Recommend Favorite

Fabrication and Characterization of Erbium-Doped Polymer Patterns by Lift-Off Process for Planar Optical Amplifiers

By Kim Wook Hyun

Molecular Crystals and Liquid Crystals, Vol. 551, Iss. 1, 2011-11 ,pp. : 273-282

Taylor & Francis Ltd

Access to resources Recommend Favorite

Rate equations model for layer epitaxial growth kinetics

By Trofimov V.I. Mokerov V.G.

Thin Solid Films, Vol. 428, Iss. 1, 2003-03 ,pp. : 66-71

Elsevier

Access to resources Recommend Favorite

Platinum film patterning by laser lift-off using hydrocarbon film on insulating substrates

By Morimoto A.

Applied Physics A, Vol. 79, Iss. 4-6, 2004-09 ,pp. : 1015-1018

Springer Publishing Company

Access to resources Recommend Favorite

Flexible Crossbar‐Structured Resistive Memory Arrays on Plastic Substrates via Inorganic‐Based Laser Lift‐Off

ADVANCED MATERIALS, Vol. 26, Iss. 44, 2014-11 ,pp. : 7480-7487

John Wiley & Sons Inc

Access to resources Recommend Favorite