Improvement of electrical properties of low dielectric constant nanoporous silica films prepared using sol–gel method with catalyst HF

Author： He Z.W.   Liu X.Q.   Su Q.   Wang Y.Y.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.82, Iss.2, 2006-02, pp. : 349-355

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