Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

Author： Robinson M.C.   Morris D.J.   Hayenga P.D.   Cho J.H.   Richards C.D.   Richards R.F.   Bahr D.F.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.85, Iss.2, 2006-11, pp. : 135-140

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Study on the Piezoelectric Behavior and Structural Changes of Strontium Doped PZT Ceramics

By  

Materials Science Forum, Vol. 2016, Iss. 869, 2016-10 ,pp. : 13-18

Trans Tech Publications

Access to resources Recommend Favorite

Influence of Calcium Concentration on the Structural and Electrical Properties of PZT Ceramic

By  

Materials Science Forum, Vol. 2014, Iss. 805, 2015-01 ,pp. : 298-304

Trans Tech Publications

Access to resources Recommend Favorite

Substitution of Nb doping on the structural, microstructural and electrical properties in PZT films

By Haccart T.   Remiens D.   Cattan E.  

Thin Solid Films, Vol. 423, Iss. 2, 2003-01 ,pp. : 235-242

Elsevier

Access to resources Recommend Favorite

PZT(65/35) and PLZT(8/65/35) thin films by sol-gel process: a comparative study on the structural, microstructural and electrical properties

By Thomas R.   Mochizuki S.   Mihara T.   Ishida T.  

Thin Solid Films, Vol. 443, Iss. 1, 2003-10 ,pp. : 14-22

Elsevier

Access to resources Recommend Favorite

Measurement of transverse piezoelectric properties of PZT thin films

By Kanno I.   Kotera H.   Wasa K.  

Sensors and Actuators A: Physical, Vol. 107, Iss. 1, 2003-10 ,pp. : 68-74

Elsevier

Access to resources Recommend Favorite