Replica molding of picosecond laser fabricated Si microstructures

Author: Reinhardt C.   Passinger S.   Zorba V.   Chichkov B.N.   Fotakis C.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.87, Iss.4, 2007-06, pp. : 673-677

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