Analysis of variable scale surface roughness on Si(111): a comparative Brewster angle, ellipsometry and atomic force microscopy investigation

Author： Lublow M.   Lewerenz H. J.  

Publisher： Maney Publishing

ISSN： 0020-2967

Source： Transactions of the Institute of Metal Finishing, Vol.83, Iss.5, 2005-10, pp. : 238-247

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