In-Situ Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer

Author: Hong Ju-Seop   Kim Chan-Soo   Yoo Seung-Wan   Park Seong-Han   Hwang Nong-Moon   Choi Hoo-Mi   Kim Dong-Bin   Kim Tae-Sung  

Publisher: Taylor & Francis Ltd

ISSN: 1521-7388

Source: Aerosol Science and Technology, Vol.47, Iss.1, 2013-01, pp. : 46-51

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