ARMAX model based run-to-run fault diagnosis approach for batch manufacturing process with metrology delay

Author： Wang Yan   Zheng Ying   Fang Huajing   Wang Yanwei  

Publisher： Taylor & Francis Ltd

ISSN： 0020-7543

Source： International Journal of Production Research, Vol.52, Iss.10, 2014-05, pp. : 2915-2930

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