Analysis of Factors in the Nanoscale Physical and Electrical Characterization of High-K Materials by Conductive Atomic Force Microscope

Author： Zhang Kai Lanza Mario Shen Ziyong Fu Qiang Hou Shimin Porti Marc Nafría Montserrat

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.153, Iss.1, 2014-05, pp. : 1-8

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