The Model and Application of Bi-directional Electrothermal Microactuator

Author： Shen Xuejin   Hu Yi   Zhou Ling   Wang Zhenlu   Chen Xiaoyang  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.153, Iss.1, 2014-05, pp. : 9-22

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