A Micromachined Wide-Band In-Plane Single-Axis Capacitive Accelerometer with a Displacement-Amplifying Compliant Mechanism

Author： Khan Sambuddha Ananthasuresh G. K.

Publisher： Taylor & Francis Ltd

ISSN： 1539-7734

Source： Mechanics Based Design of Structures and Machines, Vol.42, Iss.3, 2014-07, pp. : 355-370

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