SEM Microcharacterization of Semiconductors
( Volume 12 )
Publication series ：Volume 12
Publisher： Elsevier Science
Publication year： 2013
E-ISBN: 9781483288673
P-ISBN(Paperback): 9780123538550
Subject： TN30 general problems
Keyword： 机械、仪表工业
Language： ENG
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Description
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.