Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2015|780|39-44

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2015, Iss.780, 2015-08, pp. : 39-44

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Abstract