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Publisher: Trans Tech Publications
E-ISSN: 1662-8985|2014|1061|605-608
ISSN: 1022-6680
Source: Advanced Materials Research, Vol.2014, Iss.1061, 2015-01, pp. : 605-608
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
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Monte Carlo Simulation Model for Magnetron Sputtering Deposition
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