An In-House Approach for Fabrication of Poly-Silicon Nanobiosensor Using Conventional Photolithography and Etching Method

Publisher： Trans Tech Publications

E-ISSN： 1662-8985|2015|1109|210-213

ISSN： 1022-6680

Source： Advanced Materials Research, Vol.2015, Iss.1109, 2015-07, pp. : 210-213

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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