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Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires
Publisher: Trans Tech Publications
E-ISSN: 1662-8985|2015|1109|500-504
ISSN: 1022-6680
Source: Advanced Materials Research, Vol.2015, Iss.1109, 2015-07, pp. : 500-504
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
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