Research on Low Temperature Anodic Bonding Based on Interface Pretreatment of Dielectric Barrier Discharge Plasma

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|645|356-361

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 356-361

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Abstract