Deposition of Boron Nitride Films by Filament-Assisted CVD Using Tris(Bimethylamino)Borane Precursor

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2015|661|142-148

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.661, 2015-10, pp. : 142-148

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