Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2015|645|824-829

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 824-829

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor

By  

IOP Conference Series: Materials Science and Engineering, Vol. 108, Iss. 1, 2016-03 ,pp. : 260-269

IOP Publishing

Access to resources Recommend Favorite

The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

By  

Key Engineering Materials, Vol. 2015, Iss. 645, 2015-06 ,pp. : 528-532

Trans Tech Publications

Access to resources Recommend Favorite

Multi-Chip Module Design of a MEMS Air Pressure Sensor

By  

Key Engineering Materials, Vol. 2015, Iss. 645, 2015-06 ,pp. : 636-639

Trans Tech Publications

Access to resources Recommend Favorite

Performance Optimization of a Capacitive Pressure Sensor

By  

Key Engineering Materials, Vol. 2015, Iss. 644, 2015-06 ,pp. : 101-105

Trans Tech Publications

Access to resources Recommend Favorite

Multilayer magnetic circuit for millimeter scale MEMS air turbine generator

By  

IOP Conference Series: Materials Science and Engineering, Vol. 47, Iss. 1, 2013-12 ,pp. : 79-84

IOP Publishing

Access to resources Recommend Favorite