Performance-Enhanced Heat Converter Used in FPA Utilizing a SiOx/Al Corrugated Micro-Cantilever Actuator

E-ISSN： 1662-9795|2015|645|951-956

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 951-956

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