Evolution of the Electrical and Structural Properties of Ti/Al/W Contacts to p-Type Implanted 4H-SiC upon Thermal Annealing

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2015|821|428-431

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 428-431

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Abstract