Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2014|806|11-14

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2014, Iss.806, 2015-01, pp. : 11-14

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