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Publisher: Trans Tech Publications
E-ISSN: 1662-9752|2015|827|317-320
ISSN: 0255-5476
Source: Materials Science Forum, Vol.2015, Iss.827, 2015-09, pp. : 317-320
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
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Process-kinetics in facing targets sputtering of multi-component oxide thin films
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