A Study on Graphitization of 4H-SiC(0001) Surface under Low Pressure Oxygen Atmosphere and Effects of Pre-Oxidation Treatment

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2015|821|949-952

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 949-952

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Abstract