High-Temperature Operation of Electrostatically-Excited Single-Crystalline 4H-SiC Microcantilever Resonators

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2015|821|914-918

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 914-918

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Abstract