Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials

Author： Otell Z el Šamara V Zotovich A Hansen T de Marneffe J-F Baklanov M R

E-ISSN： 1361-6463|48|39|395202-395210

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.39, 2015-10, pp. : 395202-395210

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