Breakdown mechanism in hydrogen microdischarges from direct-current to 13.56 MHz

Author: Klas M   Moravsky L   Matejčik Š   Radjenović B   Radmilović-Radjenović M  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|40|405204-405212

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.40, 2015-10, pp. : 405204-405212

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Abstract