Surface Plasmon Interference Lithography Assisted by a Fabry–Perot Cavity Composed of Subwavelength Metal Grating and Thin Metal Film

Author： Hui-Min Liang   Jing-Quan Wang   Xue Wang   Gui-Mei Wang  

Publisher： IOP Publishing

E-ISSN： 1741-3540|32|10|104206-104209

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.10, 2015-10, pp. : 104206-104209

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