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Publisher: Bentham Science Publishers
E-ISSN: 1876-4037|7|3|165-171
ISSN: 1876-4029
Source: Micro and Nanosystems, Vol.7, Iss.3, 2015-08, pp. : 165-171
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Abstract
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Fabrication and test of multilayer microcoils with a high packaging density
By Ruffert C.
Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. :