The Effect of Doping on the Electrophysical Properties of Polycrystalline Diamond Films Deposited from an Abnormal Glow Discharge

Publisher： IOP Publishing

E-ISSN： 1742-6596|652|1|163-168

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.652, Iss.1, 2015-11, pp. : 163-168

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