Effect of post-deposition annealing on the structural and electrical properties of RF sputtered hafnium oxide thin films

Publisher： IOP Publishing

E-ISSN： 1757-899X|115|1|143-146

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.115, Iss.1, 2016-02, pp. : 143-146

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